Hydrodynamic Analysis of the Thickness Variation in a Solid Film Formed by a Spin Coating Process

The surface profile of the film formed by spin coating is experimentally investigated in this paper. unavoidable wavy form at was observed when ultraviolet curable resin used. In addition, thickness variation directly related to viscosity, disk rotation speed, and size. Fluid dynamic theory with non-dimensional analysis conducted describe after process. It found that had been thickened until viscosity force Coriolis were balanced. force, however, also affected flow instability during spinning disk. successfully described using factors. edge bump which induced hydraulic jump expressed relation power law Ekman, Weber, Reynolds numbers. paper, position are hydrodynamic theory. reveals acts based on magnitude variation, tension affects position. presented relationships will contribute further understanding outcome paper supports cost-effective productions electronic microcircuits solar cells.